METHOD FOR PRODUCING X-RAY PHASE GRATINGS AND X-RAY GRATINGS PRODUCED BY THE METHOD
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United States of America Patent
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Jan 18, 2024
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Jul 15, 2022
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Jul 15, 2022
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Disclosed herein is a method to produce hard x-ray phase gratings for x-ray multi-contrast imaging. The method is based on the conformal atomic layer deposition (ALD) of material with high x-ray refractive index decrement δ. The method is particularly suitable for submicron period x-ray phase grating fabrication. The fabrication process to produce x-ray phase gratings in this disclosure is compatible with standard semiconductor fabrication instrument and suitable for mass production.
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