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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
MICROFABRICA INC	7911 HASKELL AVENUE VAN NUYS CA 91406

International Classification(s)

• B81C:PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE M....

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• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Frodis, Uri	Los Angeles, US	61	889
Kim, Kleun	Los Angeles, US	1	0
Larsen, Rulon J	Colorado Springs, US	1	0
Le, Duy P	San Francisco, US	54	663
Levy, Nina C	Los Angeles, US	2	4
McPherson, Dale S	Kissimmee, US	17	232
Samiee, Mahmood	Glendale, US	2	0
Smalley, Dennis R	Newhall, US	214	7959
Thompson, Jeffrey A	Van Nuys, US	155	400

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
3.5 Year Payment	$1600.00	$800.00	$400.00	Jul 18, 2027
7.5 Year Payment	$3600.00	$1800.00	$900.00	Jul 18, 2031
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Jul 18, 2035

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 3.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge - 7.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent Application No: 2024/0017,990

METHODS OF SEPARATING GOOD PROBE STRUCTURES FROM DEFECTIVE PROBE STRUCTURES IN AN ELECTROCHEMICAL FABRICATION SYSTEM

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