HIGH FORCE LOW VOLTAGE PIEZOELECTRIC MICROMIRROR ACTUATOR
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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N/A
Issued Date -
Jan 11, 2024
app pub date -
Nov 12, 2021
filing date -
Nov 30, 2020
priority date (Note) -
Published
status (Latency Note)
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Abstract
A micromirror array comprises a substrate, a plurality of mirrors for reflecting incident light and, for each mirror of the plurality of mirrors, at least one multilayer piezoelectric actuator for displacing the mirror, wherein the at least one multilayer piezoelectric actuator is connected to the substrate, and wherein the at least one multilayer piezoelectric actuator comprises a plurality of piezoelectric layers of piezoelectric material interleaved with a plurality of electrode layers to form a stack of layers. Also disclosed is a method of forming such a micromirror array. The micromirror array may be used in a programmable illuminator. The programmable illuminator may be used in a lithographic apparatus and/or in an inspection and/or metrology apparatus.
First Claim
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Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
ASML NETHERLANDS B V | P O BOX 324 VELDHOVEN 5500 AH |
International Classification(s)

- 2021 Application Filing Year
- H02N Class
- 325 Applications Filed
- 174 Patents Issued To-Date
- 53.54 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
BRONDANI, TORRI Guilherme | Leuven, BE | 3 | 0 |
# of filed Patents : 3 Total Citations : 0 | |||
GOORDEN, Sebastianus Adrianus | Eindhoven, NL | 46 | 49 |
# of filed Patents : 46 Total Citations : 49 | |||
HASPESLAGH, Luc Roger Simonne | Linden, BE | 5 | 8 |
# of filed Patents : 5 Total Citations : 8 | |||
KLEIN, Alexander Ludwig | Eindoven, NL | 11 | 3 |
# of filed Patents : 11 Total Citations : 3 | |||
OSORIO, OLIVEROS Edgar Alberto | Eindhoven, NL | 5 | 23 |
# of filed Patents : 5 Total Citations : 23 | |||
OVERKAMP, Jim Vincent | Eindhoven, NL | 23 | 68 |
# of filed Patents : 23 Total Citations : 68 | |||
PANDEY, Nitesh | Silicon Valley, US | 63 | 188 |
# of filed Patents : 63 Total Citations : 188 | |||
VAN, DER WOORD Ties Wouter | Eindhoven, NL | 16 | 4 |
# of filed Patents : 16 Total Citations : 4 | |||
YEGEN, Halil Gökay | Eindhoven, NL | 3 | 2 |
# of filed Patents : 3 Total Citations : 2 |
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Patent Citation Ranking
- 0 Citation Count
- H02N Class
- 0 % this patent is cited more than
- 1 Age
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
---|---|---|---|---|
3.5 Year Payment | $1600.00 | $800.00 | $400.00 | Jul 11, 2027 |
7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Jul 11, 2031 |
11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Jul 11, 2035 |
Fee | Large entity fee | small entity fee | micro entity fee |
---|---|---|---|
Surcharge - 3.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge - 7.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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