HIGH FORCE LOW VOLTAGE PIEZOELECTRIC MICROMIRROR ACTUATOR

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20240012332A1
SERIAL NO

18038601

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A micromirror array comprises a substrate, a plurality of mirrors for reflecting incident light and, for each mirror of the plurality of mirrors, at least one multilayer piezoelectric actuator for displacing the mirror, wherein the at least one multilayer piezoelectric actuator is connected to the substrate, and wherein the at least one multilayer piezoelectric actuator comprises a plurality of piezoelectric layers of piezoelectric material interleaved with a plurality of electrode layers to form a stack of layers. Also disclosed is a method of forming such a micromirror array. The micromirror array may be used in a programmable illuminator. The programmable illuminator may be used in a lithographic apparatus and/or in an inspection and/or metrology apparatus.

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Patent Owner(s)

Patent OwnerAddress
ASML NETHERLANDS B VP O BOX 324 VELDHOVEN 5500 AH

International Classification(s)

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  • 2021 Application Filing Year
  • H02N Class
  • 325 Applications Filed
  • 174 Patents Issued To-Date
  • 53.54 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances202120222023202420250255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
BRONDANI, TORRI Guilherme Leuven, BE 3 0
GOORDEN, Sebastianus Adrianus Eindhoven, NL 46 49
HASPESLAGH, Luc Roger Simonne Linden, BE 5 8
KLEIN, Alexander Ludwig Eindoven, NL 11 3
OSORIO, OLIVEROS Edgar Alberto Eindhoven, NL 5 23
OVERKAMP, Jim Vincent Eindhoven, NL 23 68
PANDEY, Nitesh Silicon Valley, US 63 188
VAN, DER WOORD Ties Wouter Eindhoven, NL 16 4
YEGEN, Halil Gökay Eindhoven, NL 3 2

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Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges4102701 - 100255075100125150175200225250275300325350375400425450

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