ATOMIC FORCE MICROSCOPE

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United States of America Patent

APP PUB NO 20240012021A1
SERIAL NO

18021286

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An atomic force microscope (“AFM”) based interferometer, uses a light source, and a splitting optical interface, splitting the light beam into a signal light beam and a reference light beam. Both the signal and reference light beams are focused in the vicinity of an AFM cantilever. A beam displacer introduces a lateral displacement between the signal light beam and reference light beam, the lateral displacement being such that, in at least one plane between the beam displacer and the focusing lens structure, the center of the signal light beam is separated from the center of the reference light beam by more than half a sum of their beam diameters on that plane. A detector operates to determine differences in optical path length between the signal light beam and reference light beam to determine information about movement of the cantilever.

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Patent Owner(s)

Patent OwnerAddress
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE3 RUE MICHEL ANGE 75016 PARIS 75016
UNIVERSITE CLAUDE BERNARD LYON 143 BOULEVARD DU 11 NOVEMBRE 1918 LYON 69622
ECOLE NORMALE SUPERIEURE DE LYON15 PARVIS RENÉ DESCARTES BP 7000 LYON 69342
OXFORD INSTRUMENTS ASYLUM RESEARCH INC6310 HOLLISTER AVENUE SANTA BARBARA CA 93117

International Classification(s)

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  • 2021 Application Filing Year
  • G01Q Class
  • 99 Applications Filed
  • 63 Patents Issued To-Date
  • 63.64 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances202120222023202420250255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bellon, Ludovic Le Bois-d'Oingt, FR 3 0
Labuda, Aleks Santa Barbara, US 2 0
Pottier, Basile Lyon, FR 2 0

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Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges134101 - 100102030405060708090100110120130140150

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