X-Y STAGE YAW CORRECTION METHOD AND X-Y STAGE

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20240009785A1
SERIAL NO

18267267

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

The technology disclosed in the present disclosure is a method for correcting a yaw of an X-Y stage, including: moving an XY moving body in an X-axis or Y-axis direction using an actuator; measuring a yaw, which is a rotational displacement of the moved XY moving body, using a sensor; calculating, by a controller, a rotational stiffness value to be corrected, using the measured yaw data; and adding yaw correction flexures having a stiffness corresponding to the rotational stiffness value to be corrected to the X-Y stage.

First Claim

See full text

Other Claims data not available

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
KOREA INSTITUTE OF MACHINERY & MATERIALS156 GAJEONGBUK-RO YUSEONG-GU DAEJEON 305-343

International Classification(s)

loading....
  • 2021 Application Filing Year
  • B23Q Class
  • 536 Applications Filed
  • 208 Patents Issued To-Date
  • 38.81 % Issued To-Date

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
KANG, Dong Woo Daejeon, KR 62 477
KIM, Hyun Chang Sejong, KR 29 63
KIM, Jaeyoung Daejeon, KR 214 1779
KIM, Kyung Rok Daejeon, KR 58 341

Cited Art Landscape

Load Citation

Patent Citation Ranking

  • 0 Citation Count
  • B23Q Class
  • 0 % this patent is cited more than
  • 1 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges5792301 - 100255075100125150175200225250275300325350375400425450475500525550575600625

Forward Cite Landscape

Load Citation