METHOD AND APPARATUS FOR IMAGING NONSTATIONARY OBJECT

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20240004313A1
SERIAL NO

18039373

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

Disclosed is an optical imaging system, and associated method, comprising a stage module configured to support an object such that an area of the object is illuminated by an illumination beam; an objective lens configured to collect at least one signal beam, the at least one signal beam originating from the illuminated area of the object; an image sensor configured to capture an image formed by the at least one signal beam collected by the objective lens; and a motion compensatory mechanism operable to compensate for relative motion of the stage module with respect to the objective lens during an image acquisition. The motion compensatory mechanism causes a compensatory motion of one or more of: said objective lens or at least one optical element thereof; said image sensor; and/or an optical element comprised within a detection branch and/or illumination branch of the optical imaging system.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
ASML NETHERLANDS B VP O BOX 324 VELDHOVEN 5500 AH

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
KONIJNENBERG, Alexander Prasetya Veldhoven, NL 7 8
PANDEY, Nitesh Silicon Valley, US 63 188
VERSCHUREN, Coen Adrianus Eindhoven, NL 87 364
ZIJP, Ferry Nuenen, NL 46 176

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation