ALIGNMENT KEY INCLUDING MULTI-FOCAL META-LENS AND ALIGNMENT APPARATUS INCLUDING THE ALIGNMENT KEY
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United States of America Patent
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Issued Date -
Jan 4, 2024
app pub date -
Jun 30, 2023
filing date -
Jul 1, 2022
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Abstract
An alignment key includes: a first multi-focal meta-lens that includes a plurality of first nanostructures, the plurality of first nanostructures having a first shape distribution that forms two different focal lengths with respect to a first set of regions in the first multi-focal meta-lens; and a second multi-focal meta-lens that includes a plurality of second nanostructures, the plurality of second nanostructures having a second shape distribution that forms the two different focal lengths with respect to a second set of regions in the second multi-focal meta-lens.
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