COMPOSITE SUBSTRATE, METHOD FOR PRODUCING COMPOSITE SUBSTRATE, AND METHOD FOR PRODUCING GALLIUM OXIDE CRYSTAL FILM

United States of America Patent

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Issued Date
Jan 4, 2024
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Sep 19, 2023
filing date
Apr 27, 2021

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Abstract

A composite substrate includes: a base substrate and an α-Ga₂O₃crystal film that is provided on the base substrate, has a thickness of 10 μm or more, and has at least one alkali metal element content of 1.2×10¹⁵atoms/cm³or more and 1.0×10¹⁸atoms/cm³or less.

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Patent Owner(s)

Patent Owner	Address
NGK INSULATORS LTD	2-56 SUDA-CHO MIZUHO-KU NAGOYA-SHI AICHI-PREFECTURE 467-8530

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C30B:SINGLE-CRYSTAL GROWTH

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Inventor Name	Address	# of filed Patents	Total Citations
MAEDA, Miho	Nagoya-shi, JP	151	2914
SHIBATA, Hiroyuki	Okazaki-shi, JP	160	2120
YOSHIKAWA, Jun	Nagoya-shi, JP	136	4192

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COMPOSITE SUBSTRATE, METHOD FOR PRODUCING COMPOSITE SUBSTRATE, AND METHOD FOR PRODUCING GALLIUM OXIDE CRYSTAL FILM

Number of patents in Portfolio can not be more than 2000

United States of America Patent

18469661

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18469661

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