GAS PURGE UNIT AND THE LOAD PORT DEVICE
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United States of America Patent
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Issued Date -
Dec 28, 2023
app pub date -
Oct 8, 2021
filing date -
Oct 8, 2021
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Abstract
A gas purge unit including: a first purge nozzle in which a gas flow path is internally formed, which communicates with a first purge port at the bottom of a container, and which introduces gas into the container or discharges gas from the container; a first communication unit which has a first holding unit for holding the first purge nozzle at one end; and a first actuator to which the first communication unit is connected and which moves the first communication unit and the first purge nozzle vertically.
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