PIEZOELECTRIC FILM LAMINATED BODY AND MANUFACTURING METHOD OF THE SAME
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United States of America Patent
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Issued Date -
Dec 21, 2023
app pub date -
Jun 7, 2023
filing date -
Jun 9, 2022
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Abstract
A piezoelectric film laminated body includes a base member and a scandium-containing aluminum nitride film. The base member has a base surface. The scandium-containing aluminum nitride film is disposed in contact with the base surface of the base member. A surface roughness of the base surface is 0.5 nm or less in arithmetic average roughness.
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