STACKED RESONATORS WITH SHARED REFLECTOR LAYERS
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United States of America Patent
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Issued Date -
Dec 21, 2023
app pub date -
Jun 20, 2023
filing date -
Jun 20, 2022
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Abstract
The present disclosure relates to a resonator structure including stacked resonators, which share a same reflector. The disclosed resonator structure includes a first resonator and a second resonator, which is vertically stacked with the first resonator and shares a common reflector with the first resonator. Herein, the first resonator is at least composed of a first top electrode, a first piezoelectric layer underneath the first top electrode, and the common reflector underneath the first piezoelectric layer. The second resonator is at least composed of the common reflector, a second piezoelectric layer underneath the common reflector, and a second bottom electrode underneath the second piezoelectric layer. The first resonator and the second resonator are acoustically isolated from each other.
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