SINGLE SENSOR IMAGING SPECTROSCOPY FOR DETECTING NANOPARTICLES TO QUALIFY CLEAN CHAMBER PARTS
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United States of America Patent
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Issued Date -
Dec 21, 2023
app pub date -
Jun 13, 2023
filing date -
Jun 17, 2022
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Abstract
In one embodiment, an apparatus to identify chemical and spatial properties of nanoparticles in a semiconductor cleaning solution, comprises a broadband light source to provide an excitation beam; a focusing lens in a path of the excitation beam to form a focused excitation beam; a sample cell, the sample cell configured to hold a cleaning solution and one or more insoluble analytes-of-interest therein; a plurality of optical lens in the path of one or more fluorescence signals to focus the one or more fluorescence signals; and an imaging device, wherein the imaging device captures the one or more fluorescence signals to form a plurality of images that contain both spatial data and spectral data about the one or more insoluble analytes-of-interest.
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