GAS TRANSPORT SYSTEM
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United States of America Patent
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Issued Date -
Dec 21, 2023
app pub date -
Aug 4, 2023
filing date -
Nov 13, 2020
priority date (Note) -
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status (Latency Note)
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Abstract
A conduit system for transporting gas from a gas containing chamber for processing a substrate from which semiconductor devices are formed includes a liner with a spiral vent. The conduit system utilizes a curtain of gas to prevent or reduce deposition of material onto an inner surface of the conduit transporting the gas from the gas containing chamber.
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