MICROELECTROMECHANICAL ELEMENT AND A METHOD FOR MANUFACTURING IT
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United States of America Patent
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Issued Date -
Dec 21, 2023
app pub date -
Jun 13, 2023
filing date -
Jun 13, 2022
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Abstract
A microelectromechanical element is provided with patterned regions of wafer material and glass material. The regions of glass material include at least a first glass region and a second glass region formed of a first glass material and a second glass material, respectively. The first glass material enables anodic bonding with the wafer material. An alkali metal content of the second glass material is less than an alkali metal content of the first glass material.
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