SUBSTRATE PROCESSING APPARATUS
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United States of America Patent
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Issued Date -
Dec 21, 2023
app pub date -
Jul 5, 2023
filing date -
Aug 26, 2014
priority date (Note) -
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Abstract
An embodiment of the present invention provides a buff process module. The buff process module includes: a buff table on which a processing target object is mounted; a buff head that holds a buff pad for applying a predetermined process to the processing target object; a buff arm that supports and swings the buff head; a dresser for dressing the buff pad; and a cleaning mechanism that is disposed between the buff table and the dresser and is for cleaning the buff pad.
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