APPARATUS FOR MANUFACTURING DISPLAY APPARATUS AND METHOD OF MANUFACTURING DISPLAY APPARATUS

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United States of America Patent

APP PUB NO 20230395365A1
SERIAL NO

18205370

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Abstract

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A method of manufacturing a display apparatus, the method includes removing an oxide layer formed on a surface of a substrate by utilizing a hydrofluoric acid gas and an ammonia gas, and thermally treating the substrate from which the oxide layer has been removed. A flow ratio between the hydrofluoric acid gas and the ammonia gas is about 0.8:1 to about 1:1.

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Patent Owner(s)

Patent OwnerAddress
SAMSUNG DISPLAY CO LTDGYEONGGI-DO 17113
TES CO LTD2374-36 JUNGBU-DAERO YANGJI-MYEON CHEOIN-GU YONGIN-SI GYEONGGI-DO 17162
LTC CO LTD(KYEONGGI HWASUNGBIOBELLY) 114 CHEONGWONSANDAN 8-GIL MADO-MYEON GYEONGGI-DO HWASEONG-SI 14067

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Byun, Kicheon Hwaseong-si, KR 2 0
Cho, Woojin Yongin-si, KR 57 110
Jo, Gugrae Yongin-si, KR 23 117
Kim, Hyoungsik Yongin-si, KR 10 30
Kim, Kyusang Hwaseong-si, KR 21 43
Kim, Seonjeong Hwaseong-si, KR 6 22
Lee, Hongjae Yongin-si, KR 3 0
Lee, Jongsoon Hwaseong-si, KR 4 1
Lee, Woojin Yongin-si, KR 166 45360
Ma, Heejeon Yongin-si, KR 2 0
Park, Wonil Yongin-si, KR 2 0

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