CHAMBER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING METHOD
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United States of America Patent
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Issued Date -
Nov 30, 2023
app pub date -
Aug 10, 2023
filing date -
Mar 24, 2021
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Abstract
A chamber device includes an inner housing including a passage port through which light generated by excitation of laser gas at an internal space thereof passes, an outer housing surrounding at least a part of the inner housing from a lateral side of a travel direction of the light, and a partition wall arranged between the inner housing and the outer housing and fixed to the inner housing and the outer housing.
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