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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD	HSIN-CHU 300-77

International Classification(s)

• G03F:PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNE....
• B67D:DISPENSING, DELIVERING, OR TRANSFERRING LIQUIDS, N....

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• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Huang, Yu-Chen	Toufen Township, TW	53	256
Hwang, Ho-Yung David	Chu Pei City, TW	46	361
Lee, Heng-Jen	Baoshan Township, TW	34	632
Liu, Hsu-Yuan	Zhudong Township, TW	4	6
Wang, Shih-Che	Hsin-Chu City, TW	24	108
Wu, Cheng-Han	Taichung City, TW	111	309
Zhou, Wen-Zhan	Zhubei City, TW	16	365

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
3.5 Year Payment	$1600.00	$800.00	$400.00	May 30, 2027
7.5 Year Payment	$3600.00	$1800.00	$900.00	May 30, 2031
11.5 Year Payment	$7400.00	$3700.00	$1850.00	May 30, 2035

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 3.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge - 7.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent Application No: 2023/0384,680

SYSTEM AND METHOD FOR SUPPLYING AND DISPENSING BUBBLE-FREE PHOTOLITHOGRAPHY CHEMICAL SOLUTIONS

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