X-RAY INSPECTION APPARATUS AND METHOD OF INSPECTION WITH X-RAYS

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United States of America Patent

APP PUB NO 20230384247A1
SERIAL NO

18137910

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Abstract

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Proposed are an X-ray inspection apparatus and a method of inspection with X-rays in which even in a sample having coated portion and uncoated portion of the cathode material, the inspection of foreign objects in the both portions can be simultaneously performed under the same conditions. The X-ray inspection apparatus includes an X-ray source (2) that irradiates the sample (S) with X-rays (X1), an X-ray detection unit (3) which is installed at a side opposite to the X-ray source with respect to the sample and detects the X-rays that passed through the sample, and a filter (4) installed between the X-ray source and the X-ray detection unit, wherein the sample has a region with a large amount of X-ray absorption and a region with a small amount of X-ray absorption.

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Patent Owner(s)

Patent OwnerAddress
HITACHI HIGH-TECH ANALYSIS CORPORATION17-1 TORANOMON 1-CHOME MINATO-KU TOKYO 105-6411

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
IWATA, Kazuya Tokyo, JP 60 726
MATSUBARA, Satoshi Tokyo, JP 102 690
SATO, Tsuneo Tokyo, JP 74 1095
SEKI, Yuta Tokyo, JP 42 89
TAKAHARA, Toshiyuki Tokyo, JP 24 141

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