X-RAY INSPECTION APPARATUS AND METHOD OF INSPECTION WITH X-RAYS
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United States of America Patent
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Issued Date -
Nov 30, 2023
app pub date -
Apr 21, 2023
filing date -
May 31, 2022
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status (Latency Note)
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Abstract
Proposed are an X-ray inspection apparatus and a method of inspection with X-rays in which foreign objects in even a sample in which bending, sagging, or curving may occur can be inspected accurately. The X-ray inspection apparatus includes an X-ray source (2) which irradiates a sample with an X-ray, an X-ray detection unit (3) that is installed on a side opposite to the X-ray source with respect to the sample and detects the X-ray that passed through the sample, and a sample support mechanism (14) that supports the sample, wherein the sample is flexible and has a shape of a film, and the sample support mechanism has a support body (4) through which the X-ray is capable of passing and which is in close contact with and supports at least a portion of the sample, that is disposed between the X-ray source and the X-ray detection unit.
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