ELECTRON SOURCE, PLASMA SOURCE AND SWITCH DEVICE
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United States of America Patent
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Issued Date -
Nov 23, 2023
app pub date -
Feb 13, 2023
filing date -
May 17, 2022
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Abstract
According to one embodiment, an electron source includes a base body and a first cathode layer. The first cathode layer includes a first diamond layer including a plurality of first polycrystalline diamonds, and a first member including a first element. At least a part of the first diamond layer is located between the base body and the first member. The first element includes at least one selected from the group consisting of Pd, Ni, Co, W, Mo, Ir and Ru.
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