Piezoelectric Element And Liquid Droplet Dispensing Head
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United States of America Patent
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Issued Date -
Nov 16, 2023
app pub date -
Apr 27, 2023
filing date -
Apr 27, 2023
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Abstract
A piezoelectric element according to the present disclosure includes: a substrate; a first adhesion layer formed on the substrate and containing titanium; at least one of second adhesion layers formed on the substrate and containing titanium oxide; a first electrode formed on the first adhesion layer and the second adhesion layer; a seed layer formed on the first electrode and the substrate and containing titanium; a piezoelectric layer formed on the seed layer; and a second electrode formed on the piezoelectric layer. At least a part of an end portion of the first electrode is formed on the second adhesion layer.
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