BULK-ACOUSTIC WAVE RESONATOR
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United States of America Patent
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Issued Date -
Nov 16, 2023
app pub date -
Jan 25, 2023
filing date -
Jan 25, 2023
priority date (Note) -
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status (Latency Note)
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Abstract
A bulk-acoustic wave resonator includes a substrate; a lower electrode, disposed on the substrate, comprising a first inclined surface and a second inclined surface; and an insertion layer disposed on an edge of the lower electrode. The first inclined surface extends from an inclined surface of the insertion layer in a region disposed inside the insertion layer. The second inclined surface extends from the first inclined surface in a region inside a region of the first inclined surface.
First Claim
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