ENCAPSULATION STRUCTURE, SUBSTRATE, AND ENCAPSULATION METHOD
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United States of America Patent
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Nov 16, 2023
app pub date -
Jul 28, 2023
filing date -
Jul 28, 2023
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Abstract
The technology of this application relates to an encapsulation structure that includes a micro-electromechanical system (MEMS) device, a substrate, and an attachment material. Materials included in the substrate include at least a first-type material and a second-type material, a coefficient of thermal expansion of the first-type material is less than a coefficient of thermal expansion of a base material of the MEMS device, and a coefficient of thermal expansion of the second-type material is greater than the coefficient of thermal expansion of the base material of the MEMS device. The attachment material is located between the MEMS device and the substrate, and is configured to attach the MEMS device to the substrate. The substrate includes a plurality of different materials.
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