RADICAL GENERATION DEVICE AND ION SPECTROMETER
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United States of America Patent
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Issued Date -
Nov 9, 2023
app pub date -
Apr 26, 2021
filing date -
Sep 15, 2020
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Abstract
A radical generation device includes: a cylindrical tube; an antenna; an outer conductor part; and a connection part which has a double cylindrical tube structure including an inner cylindrical body and an outer cylindrical body, end portions of the inner cylindrical body and the outer cylindrical body on the same side are divided in a circumferential direction notches extending in an axial direction to form divided pieces, and tapered portions swelling outward toward a tip end are formed on an outer side of the divided pieces or tapered portions swelling inward toward a tip end are formed on an inner side of the divided pieces.
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