VAPOR PHASE GROWTH APPARATUS AND REFLECTOR
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United States of America Patent
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Issued Date -
Nov 9, 2023
app pub date -
Apr 17, 2023
filing date -
May 6, 2022
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Abstract
A vapor phase growth apparatus of embodiments includes: a reactor; a holder provided in the reactor to place a substrate thereon; an annular out-heater provided below the holder; an in-heater provided below the out-heater; a disk-shaped upper reflector provided below the in-heater and formed of pyrolytic graphite; and a disk-shaped lower reflector provided below the upper reflector, formed of silicon carbide, and having a thickness smaller than that of the upper reflector.
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