Manufacturing Method Of Piezoelectric Element, Piezoelectric Element, And Liquid Droplet Dispensing Head
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United States of America Patent
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Nov 2, 2023
app pub date -
May 1, 2023
filing date -
May 2, 2022
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Abstract
A manufacturing method of a piezoelectric element includes: forming a first conductive film on a vibration plate as a substrate; etching a first conductive film; forming a second conductive film on the first conductive film; etching the second conductive film to form a first electrode having a step region as a step formed by the second conductive film and the first conductive film at ends thereof; forming a seed layer as an orientation control layer covering the first electrode by a liquid phase method; forming a piezoelectric film on the seed layer; etching the piezoelectric film to form a piezoelectric body; and forming a second electrode covering the piezoelectric body.
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