METHOD OF MANUFACTURING DISPLAY APPARATUS
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United States of America Patent
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Issued Date -
Nov 2, 2023
app pub date -
Apr 28, 2023
filing date -
Apr 29, 2022
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Abstract
A method of manufacturing a display apparatus includes forming a semiconductor layer on a substrate, forming an insulating layer on the semiconductor layer, forming a photoresist pattern on the insulating layer, forming, by etching the insulating layer, a contact hole exposing at least a portion of the semiconductor layer, and performing a primary cleaning of the insulating layer in which the contact hole is formed using a cleaning gas including a fluorine-containing gas and a hydrogencontaining gas.
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