DIGIT LINE AND CELL CONTACT ISOLATION
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United States of America Patent
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Issued Date -
Nov 2, 2023
app pub date -
Apr 28, 2022
filing date -
Apr 28, 2022
priority date (Note) -
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Abstract
Methods, apparatuses, and systems related to a digit line and cell contact are described. An example apparatus includes a semiconductor structure comprising a first layer comprising a first material on sidewalls of a plurality of patterned material. The apparatus further includes a second layer comprising a nitride material on sidewalls of the first layer. The apparatus further includes a third layer comprising the first material on sidewalls of the second layer. The apparatus further includes a base area, to provide digit line and cell contact isolation for the semiconductor structure. The apparatus further includes an active area, adjacent to the base area, that is adjacent to the semiconductor structure.
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