MULTI-CHAMBER DEPOSITION EQUIPMENT FOR SOLID FREE FORM FABRICATION
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United States of America Patent
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Issued Date -
Oct 26, 2023
app pub date -
Dec 21, 2022
filing date -
Jul 8, 2016
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Abstract
Provided is a chamber system for solid free form fabrication, the chamber system having a deposition chamber, a service chamber and one or more loading/unloading chambers. The chamber system allows for a more efficient and cost effective process to service the deposition apparatus, load holding substrates, and unload workpieces without requiring having to adjust the atmosphere in the deposition chamber.
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