INTERFACE MODULE HAVING FAN FILTER UNIT
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United States of America Patent
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Issued Date -
Oct 19, 2023
app pub date -
Apr 18, 2023
filing date -
Apr 19, 2022
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Abstract
Examples of an interface module include a fan filter unit including a fan and a filter, a housing surrounding a space adjacent to the filter, a discharge system attached to the housing, a substrate support instrument provided in the housing, an upper housing surrounding a space adjacent to the fan, a gas supply system attached to the upper housing, a circulation duct connected to the housing and the upper housing, and a radiator provided between the fan and the filter.
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