SEMICONDUCTOR DEVICE AND FABRICATION METHOD THEREOF
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United States of America Patent
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Issued Date -
Oct 12, 2023
app pub date -
Mar 16, 2023
filing date -
Apr 7, 2022
priority date (Note) -
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Abstract
A semiconductor device includes a substrate and a well region both having a first conductivity type, a trench in the substrate and directly above the well region, a first trench gate and a second trench gate disposed in the trench and laterally separated from each other, a dielectric isolation portion disposed in the trench and between the first and second trench gates, and a dielectric liner in the trench and under bottom surfaces of the first and second trench gates. A middle region of a bottom surface of the dielectric isolation portion protrudes downward and is lower than two side regions of the bottom surface of the dielectric isolation portion. Below a horizontal line of the bottom surfaces of the first and second trench gates, the thickness of the dielectric isolation portion is greater than the thickness of the dielectric liner.
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