OPTICAL SYSTEM, AND METHOD FOR OPERATING AN OPTICAL SYSTEM
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United States of America Patent
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Issued Date -
Oct 12, 2023
app pub date -
Jun 2, 2023
filing date -
Jan 28, 2021
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Abstract
An optical system, for example in a microlithographic projection exposure apparatus, comprises a mirror and a temperature-regulating device. The mirror has an optical effective surface and a mirror substrate. A plurality of temperature-regulating zones are arranged in the mirror substrate. The temperature-regulating device is used to adjust the temperatures present in each of the temperature-regulating zones independently of one another. The temperature-regulating zones are arranged in at least two planes at different distances from the optical effective surface. The temperature-regulating zones in the at least two planes are configured as cooling channels through which, independently of one another, a cooling fluid at a variably adjustable cooling fluid temperature is able to flow. A method for operating such an optical system is provided.
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