MEASUREMENT METHOD OF SURFACE SHAPE AND SURFACE SHAPE MEASUREMENT DEVICE
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United States of America Patent
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Oct 12, 2023
app pub date -
Mar 13, 2023
filing date -
Mar 22, 2022
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Abstract
A measurement method of a surface shape and a surface shape measurement device uses an interferometer optical head that acquires an interference fringe image generated by a light path difference between the reference light and the measurement light, acquires N interference fringe images by scanning from a start point to an end point in the Z-axis direction, and measures the surface shape of the measurement target surface based on the interference fringe images. For a common position in the N interference fringe images, regarding an interference signal including values of N points that indicates a change in the interference light intensity along the Z-axis direction, a phase of an interference fringe produced by the light of a predetermined analysis wavelength is determined, and the relative position in the Z-axis direction of the measurement target surface within the range of the analysis wavelength is determined based on the phase.---
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