DEPOSITION METHODS AND APPARATUS FOR PIEZOELECTRIC APPLICATIONS
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United States of America Patent
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Oct 5, 2023
app pub date -
Aug 24, 2020
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Aug 24, 2020
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Abstract
Disclosed are methods and apparatus for depositing uniform layers on a substrate (201) for piezoelectric applications. An ultra-thin seed layer (308) having a uniform thickness from center to edge thereof is deposited on a substrate (201). A template layer (310) closely matching the crystal structure of a subsequently formed piezoelectric material layer (312) is deposited on a substrate (201). The uniform thickness and orientation of the seed layer (308) and the template layer (310), in turn, facilitate the growth of piezoelectric materials with improved crystallinity and piezoelectric properties.
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