PIEZOELECTRIC ELEMENT AND PIEZOELECTRIC ELEMENT APPLICATION DEVICE
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United States of America Patent
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Issued Date -
Oct 5, 2023
app pub date -
Mar 29, 2023
filing date -
Mar 29, 2023
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Abstract
A piezoelectric element according to the present disclosure includes: a substrate containing silicon; a first electrode formed on the substrate; a piezoelectric layer formed on the first electrode and containing potassium, sodium, and niobium; and a second electrode formed on the piezoelectric layer, in which a first diffusion inhibition layer containing an insulating material is disposed between the substrate and the piezoelectric layer, the piezoelectric layer is continuously formed on a first region which is a surface of the first electrode, a second region which is a surface of the first diffusion inhibition layer, and a third region which is a surface of the substrate, and the third region is between the first region and the second region.
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