SEMICONDUCTOR DEVICE USING ONE OR MORE SLOTS ADDED TO ISOLATION REGION SURROUNDING INDUCTOR FOR ISOLATION IMPROVEMENT
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United States of America Patent
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Issued Date -
Oct 5, 2023
app pub date -
Mar 9, 2023
filing date -
Mar 9, 2023
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Abstract
A semiconductor device includes a metal layer, a ground plane formed on the metal layer, a first inductor formed on the metal layer, and a first isolation region formed on the metal layer and arranged to separate the first inductor from the ground plane. The first isolation region includes a first main area surrounding the first inductor, and at least one first slot extended from the first main area.
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