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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD	HSINCHU

International Classification(s)

• G03F:PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNE....

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
CHANG, Ya Hui	Hsinchu City, TW	54	176
CHENG, Chieh-Jen	Hsinchu City, TW	24	182
HSIEH, Ken-Hsien	Taipei City, TW	113	1847
LAI, Yu-Tse	Zhubei City, TW	12	0
SU, Wei-Shuo	Hsinchu City, TW	15	26
WANG, Sheng-Min	New Taipei City, TW	18	88

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
3.5 Year Payment	$1600.00	$800.00	$400.00	Mar 28, 2027
7.5 Year Payment	$3600.00	$1800.00	$900.00	Mar 28, 2031
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Mar 28, 2035

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 3.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge - 7.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent Application No: 2023/0305,381

EUV PHOTO MASKS AND MANUFACTURING METHOD THEREOF

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