VARIABLE WAVELENGTH INTERFERENCE FILTER
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United States of America Patent
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Issued Date -
Sep 28, 2023
app pub date -
Mar 24, 2023
filing date -
Mar 28, 2022
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Abstract
A variable wavelength interference filter includes a first substrate, a second substrate facing the first substrate via a predetermined gap, a first reflection film installed at the first substrate, a second reflection film installed at the second substrate, and facing the first reflection film via a first gap, a coupling portion disposed between the first substrate and the second substrate, and a driving unit configured to change the first gap. The coupling portion has a part of a first facing surface coupled to the first substrate. The first facing surface faces the first substrate. A portion of the first facing surface of the coupling portion not coupled to the first substrate constitutes a displacement portion facing the first substrate via a second gap. A part of a second facing surface of the displacement portion is coupled to the second substrate. The second facing surface faces the second substrate. The driving unit changes the second gap by bending the displacement portion, thereby changing the first gap.
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