FLEXIBLE HYDROGEN SENSOR WITH ULTRA-HIGH SENSITIVITY AND WIDE RANGE AND FABRICATION METHOD THEREFOR
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United States of America
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Sep 28, 2023
app pub date -
May 13, 2021
filing date -
May 13, 2021
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Disclosed is a flexible hydrogen sensor with ultra-high sensitivity and a wide range and a fabrication method therefor. The sensor includes a conductive electrode layer (4), a sensing layer and a flexible substrate layer (1) in sequence from top to bottom. The sensing layer includes a MOxfilm (2) and Pd nanoparticles (NPs) (3), and the Pd NPs (3) are covered on the MOx film (2). A traditional metal oxide type hydrogen sensor and a quantum conductance-based hydrogen sensor are combined on a flexible polymer substrate by means of an atomic layer deposition (ALD) technology and a cluster beam deposition (CBD) technology, so as to obtain a flexible hydrogen sensor with ultra-high sensitivity, a wide range and excellent selectivity and lower working temperature.
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