MEASUREMENT METHOD OF SURFACE SHAPE AND SURFACE SHAPE MEASUREMENT DEVICE
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United States of America Patent
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Issued Date -
Sep 28, 2023
app pub date -
Mar 13, 2023
filing date -
Mar 22, 2022
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Abstract
A measurement method of a surface shape includes combining N stacked images captured while scanning the measuring head. For a position in the N stacked images, from an integral curve including values of N points, which is obtained by integrating square values or absolute values of the interference signal including values at N points: a start-point-side noise part straight line that approximates a start-point-side noise part, which corresponds to a range where the slope is smaller than the slope in the vicinity of the measurement target surface at the start-point-side than the measurement target surface; an end-point-side noise part straight line that approximates an end-point-side noise part, which corresponds to a range where the slope is smaller than the slope in the vicinity of the measurement target surface at the end-point-side than the measurement target surface; and a surface proximity straight line that approximates surface proximity part.
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