PIEZOELECTRIC ELEMENT
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United States of America Patent
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Issued Date -
Sep 21, 2023
app pub date -
Mar 15, 2023
filing date -
Mar 17, 2022
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Abstract
A piezoelectric element includes an adhesion layer formed at a vibration plate and containing titanium, a lower electrode formed at the adhesion layer, a diffusion reduction layer formed at the lower electrode and containing iridium, a seed layer formed at the diffusion reduction layer and containing bismuth, a piezoelectric layer formed at the seed layer and containing potassium, sodium, and niobium, and an upper electrode formed at the piezoelectric layer.
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