PROCESS OF FORMING AN ELECTRONIC DEVICE INCLUDING A COMPONENT STRUCTURE ADJACENT TO A TRENCH
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United States of America Patent
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Issued Date -
Sep 7, 2023
app pub date -
Mar 2, 2022
filing date -
Mar 2, 2022
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Abstract
A process of forming an electronic device can form an accumulation channel or an integrated diode by selective doping parts of a workpiece. In an embodiment, a doped region can be formed by implanting a sidewall of a body region. In another embodiment, a doped region can correspond to a remaining portion of a semiconductor layer after forming another doped region by implanting into a contact opening. The accumulation channel or the integrated diode can lower the barrier for a body diode turn-on. Reduced stored charge and QRR may be achieved, leading to lower switching losses.
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