Force measurement device and method for bonding or encapsulation process and apparatus incorporating the device

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United States of America Patent

PATENT NO 12072251
APP PUB NO 20230280218A1
SERIAL NO

17683453

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Importance

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Abstract

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A device for measuring a force applied to a component when the component is being bonded to a component carrier, or when the component is being encapsulated includes a deformable portion and a contacting stem connected to the deformable portion. The deformable portion is configured to incorporate a sensor for detecting a degree of deformation of the deformable portion caused by application of the force in order to measure the force. In use, the contacting stem is positionable to contact the component or the component carrier so that the deformable portion is deformed when the force is applied to the component. One or more such devices may be included in a sintering or encapsulation apparatus for measuring the said force.

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Patent Owner(s)

Patent OwnerAddress
ASMPT SINGAPORE PTE LTDSINGAPORE 768924

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gaunekar, Ajit Shriman Singapore, SG 4 17
Kwan, Ka Shing Singapore, SG 19 39
Wang, Zhi Tao Singapore, SG 1 0

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