SUBSTRATE PROCESSING APPARATUS
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United States of America Patent
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Issued Date -
Aug 17, 2023
app pub date -
Feb 6, 2023
filing date -
Feb 14, 2022
priority date (Note) -
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Abstract
A substrate processing apparatus includes a vacuum container, a placing part provided inside the vacuum container and having a placing surface on which a substrate is placed, and a ceiling member provided above the placing part. The ceiling member includes a fixed member fixed to the vacuum container, a movable member attached to the fixed member and having a first facing surface facing the placing surface, a spacer sandwiched between the fixed member and the movable member, a first seal member provided between the fixed member and the spacer, a second seal member provided between the movable member and the spacer, and a plurality of adjustment bolts screwed into the fixed member through the movable member.
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