Charged Particle Beam Device and Scan Waveform Generation Method
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United States of America Patent
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N/A
Issued Date -
Aug 17, 2023
app pub date -
Jul 13, 2020
filing date -
Jul 13, 2020
priority date (Note) -
Published
status (Latency Note)
Importance
Abstract
It is aimed to properly correct the various types of distortion without a reduction in observation throughput. The present disclosure provides a charged particle beam device that obtains an image by irradiating a specimen with a charged particle beam and includes: a deflection coil that scans the charged particle beam on the specimen; a D/A converter that converts a digital scan waveform into an analog scan waveform and outputs the analog scan waveform to the deflection coil to drive the deflection coil; and a scan waveform generation unit that generates a digital scan waveform and outputs the digital scan waveform to the D/A converter, in which the scan waveform generation unit has a basic LUT that stores parameters for correcting the digital scan waveform and includes a correction circuit that corrects a distortion characteristic of the deflection coil
First Claim
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