Laterally Vibrating Bulk Acoustic Wave Resonator
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United States of America Patent
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Issued Date -
Aug 10, 2023
app pub date -
Apr 17, 2023
filing date -
Jul 10, 2018
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Abstract
A laterally vibrating bulk acoustic wave (LVBAW) resonator includes a piezoelectric plate sandwiched between first and second metal layers. The second metal layer is patterned into an interdigital transducer (IDT) with comb-shaped electrodes having interlocking fingers. The width and pitch of the fingers of the electrodes determine the resonant frequency. A combined thickness of the first and second metal layers and the piezoelectric layer is less than the pitch of the interlocking fingers.
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