ONLINE VACUUM DEGREE DETECTION SYSTEM AND METHOD BASED ON SINGLE-FIBER LASER-INDUCED BREAKDOWN SPECTROSCOPY
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United States of America Patent
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Issued Date -
Aug 3, 2023
app pub date -
Aug 10, 2022
filing date -
Jan 28, 2022
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Abstract
Disclosed are an online vacuum degree detection system and method based on single-fiber laser-induced breakdown spectroscopy. In the system, a laser device generates laser that excites the laser through fiber induced breakdown spectroscopy; a fiber coupler couples and injects the laser; a single fiber is connected to the fiber coupler to transmit the laser; one end of an LIBS probe is connected to the single fiber, and the other end of the LIBS probe extends into a vacuum arc-extinguishing chamber; the laser is induced by the LIBS probe to generate plasma, and the plasma is subjected to self-emission imaging and enters the fiber coupler via the LIBS probe; a dichroscope is arranged on the fiber coupler to separate the laser from the plasma; a processor is connected to a camera and a spectrometer.
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