Sample, method for manufacturing sample, and method for measuring infrared absorption spectrum

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United States of America Patent

PATENT NO 11828772
APP PUB NO 20230236221A1
SERIAL NO

17882456

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Abstract

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A sample for atomic force microscopy-based infrared spectroscopy includes a substrate, a measurement portion provided on the substrate and having a first light absorption intensity when a light of a first wavelength is irradiated thereon, and a first film provided on the measurement portion and having a higher coefficient of thermal expansion than the measurement portion and a second light absorption intensity, which is less than the first light absorption intensity, when the light of the first wavelength is irradiated thereon.

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Patent Owner(s)

Patent OwnerAddress
KIOXIA CORPORATION1-21 SHIBAURA 3-CHOME MINATO-KU TOKYO 108-0023

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ito, Machiko Yokkaichi Mie, JP 14 70
Nakai, Takehiro Yokkaichi Mie, JP 16 63
Yamada, Yuji Kuwana Mie, JP 162 1623

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