MICROWAVE PLASMA DEVICE WITH INCREASED SELECTIVITY OF NITROGEN OXIDE AND METHOD OF PRODUCING NITROGEN OXIDE-CONTAINING WATER USING SAME
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United States of America Patent
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Issued Date -
Jul 27, 2023
app pub date -
May 25, 2021
filing date -
Jun 26, 2020
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Abstract
Provided is a microwave plasma device, including: a hollow tube that is hollow and irradiated with a microwave; a swirl gas inlet that is located at a lower end portion of the hollow tube and injected with a swirl gas; an axial gas inlet that penetrates through the lower end portion of the hollow tube and injected with an axial gas; and a swirl gas barrier that is located inside the hollow tube, located near where the swirl gas is injected, and extends in a longitudinal direction of the hollow tube, in which a gap g is formed between the swirl gas barrier and the hollow tube, and plasma is generated inside the hollow tube and nitrogen oxide is generated inside the hollow tube.
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